EDS detectors have evolved significantly since the first commercial SDD technology roughly 15 years ago. However the advanced detection capabilities of a wavelength-dispersive spectrometer greatly improve confidence in SEM-based elemental analysis, effective detection of trace elements, and accurate mapping of very light elements.

Electron microprobes use a WD spectrometer that relies on curved diffractors and Rowland circle geometry. With 5 WD spectrometers and a chamber designed around the unique requirements of the Rowland circle spectrometer geometry, an effective X-ray analytical system is both feasible and commercially available.

Scanning electron microscopes, on the other hand, are not designed with WDS in mind. The Rowland circle WD spectrometer requires a special mechanical port, which the SEM may or may not have available. The unique geometry requirements of the Rowland circle, coupled with a diversity of SEM chamber geometries mandates that the Rowland circle be mounted horizontally instead of in the preferred, vertical configuration. The result is a sub-optimal WDS configuration with performance that seriously lags that of an electron microprobe.

The Pathfinder software platform uses a parallel beam WD geometry with a collimating optic that contains both a low and a mid to high energy component. It is optimized for the range of SEM chamber designs available. The WD spectrometer mounts in a standard EDS port with fully automated alignment and operation. The result: A dramatic improvement in X-ray collection rates across the spectrum of elements – Be to Pu – for virtually any SEM chamber geometry.


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