Multi-technique Surface Analysis and Cluster Ion Sample Cleaning

Multi-technique Surface Analysis and Cluster Ion Sample Cleaning (Recorded Webinar)
The need for more detailed chemical and structural information is being complemented by increasing functionality and automation in instrumentation. It is now possible to use a single instrument to analyze a sample using four or more techniques in quick succession.

Techniques such as Ultraviolet Photoelectron Spectroscopy (UPS), Ion Scattering Spectroscopy (ISS) and Reflected Electron Energy Loss Spectroscopy (REELS) are being used frequently to extend analyses.

We present how a dual mode ion source can be used for multi-technique sample analysis, showing the importance of sample cleaning to extracting correct values for important parameters such as the work function, and how depth profiles can be performed which collect data using XPS and UPS in the same experiment.

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